








|
Model |
SEC-4400 | SEC-4500 | SEC-4550 | SEC-4600 |
| StandardFlow Range(N2 Eq.) | 5 sccm ~ 8 slm | 10 ~ 30 slm | 31 ~ 50 slm | 51 ~ 100 slm |
| Wetted Materials | M (metal) -Type: SUS-316L-R (viton) type | |||
| Valve Piezo Valve | (Normal Close or Normal Open) | |||
| FlowControl Range | 2 ~ 100% F.S. | |||
| Accuracy | ± 1% F.S. | |||
| Response | <1.0sec. (500ms typical) | |||
| Linearity | ± 0.5% F.S. | |||
| Repeatability | ± 0.2% F.S. | |||
| Operating Pressure | 14 ~ 42 psi | 21 ~ 42 psi | ||
| Leak Integrity | M-Type: 5x10 -10 Pa·m ³/s(He) or less | |||
| Operating Temperature | 5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) | |||
| Flow Rate Setting Signal | 0.1 ~ 5VDC | |||
| Flow Rate Output Signal | 0 ~ 5VDC | |||
| Power Supply | ± 15VDC ± 5% 60mA | |||
| Standard Fitting | 1/4” VCR, 1/4” Swagelok | 3/8”VCR,3/8”Swagelok | ||