390微离子®模块结合了经过验证的微离子电离计技术、微型热损失传感器和两个压阻式传感器，提供从高真空到大气压的精确连续压力测量。
The Micro-Ion® ATM module combines proven Micro-Ionionization gauge technology with a miniature Conductronheat loss sensor and two Piezo resistive sensors to provideaccurate, continuous pressure measurement from highvacuum to atmosphere
This small module combines all foursensors and control electronics in a compact modulardesign, reducing the number of gauges required on achamber and minimizing the required space.全范围压力测量结果作为单个模拟信号输出，或者通过可选的 EtherCAT®、RS-485 或 DeviceNet™ 接口提供。