本标准规定了电子工业用气体氧和散装液态氧的技术要求，检验方法，检验规则及产品的包装、标志、运输、贮存及安全要求。
电子工业用氧主要用于二氧化硅化学气相淀积，用作氧化源和生产高纯水的反应剂，用于等离子体蚀刻和剥离。也可用于光导纤维。
 

名称：脱氧柱

规格：2m*4mm（内径）

材质：不锈钢/玻璃

粒度：400um-800um

型号：401脱氧剂

应用：GB/T 14604-1993 电子工业用气体 氧

 

适用于安捷伦6890,7890,7820,6890,5890,4890,8860,8890

岛津GC-14C，GC-2010，GC-2014，GC-2018，GC-2030

赛默飞1310系列，布鲁克，PE，磐诺，北分瑞利，东西电子，天瑞，天美，福立，川仪等

 
This standard specifies the technical requirements, inspection methods, inspection rules, and packaging, labeling, transportation, storage, and safety requirements for gaseous oxygen and bulk liquid oxygen used in the electronics industry.
Oxygen used in the electronic industry is mainly used for silicon dioxide chemical vapor deposition, as an oxidation source and reactant for producing high-purity water, and for plasma etching and stripping. It can also be used for optical fibers.
Name: Deoxygenation Column
Specification: 2m * 4mm (inner diameter)
Material: Stainless Steel/Glass
Particle size: 400um-800um
Model: 401 Deoxidizer
Application: Gas Oxygen for Electronic Industry (GB/T 14604-1993)
Suitable for Agilent 689078907820689058904890886088890
Shimadzu GC-14C, GC-2010，GC-2014，GC-2018，GC-2030
Thermo Fisher 1310 series, Brooke, PE， Panno, Beifen Ruili, Dongxi Electronics, Tianrui, Tianmei, Fuli, Chuanyi, etc