浩瀚色谱（山东）应用技术开发有限公司在大量数据的基础上,通过软件对多晶硅碳含量和回收氢气中甲烷含量进行相关性和回归性分析,结果表明:当回收氢中甲烷含量大于 2ppmv时,其与多晶硅碳含量具有显著高度正相相关关系;当回收氢中甲烷含量小于2ppmv时,其与多晶硅碳含量不具有显著性相关关系.

名称：填充柱
规格：40cm*2mm（内径）
型号：13X，60-80目

名称：甲烷转化柱
规格：25cm*3mm（内径）0.2mm的镍催化剂

应用：多晶硅用回收氢气中氯化氢、氮气、氧气、总碳含量的测定-气相色谱法.
  On the basis of a large amount of data, Haohan Chromatography (Shandong) Applied Technology Development Co., Ltd. uses software to analyze the correlation and regression of the polysilicon carbon content and the methane content in the recovered hydrogen. The results show that when the methane content in the recovered hydrogen is greater than 2ppmv, It has a significant and highly positive correlation with the polysilicon carbon content; when the methane content in the recovered hydrogen is less than 2 ppmv, it does not have a significant correlation with the polysilicon carbon content.

Name: Packed column
Specification: 40cm*2mm (inner diameter)
Model: 13X, 60-80 mesh

Name: Methane Conversion Column
Specification: 25cm*3mm (inner diameter) 0.2mm nickel catalyst

Application: Determination of Hydrogen Chloride, Nitrogen, Oxygen, and Total Carbon in Reclaimed Hydrogen for Polycrystalline Silicon-Gas Chromatography.