Protective Coating PMMA Electra 92 (AR-PC 5090)
Conductive protective coating for non-novolak-based e-beam resists
Top layer for the dissipation of e-beam charges on insulating substrates
英国ALLRESIST防护涂层PMMA Electra 92 (AR-PC 5090)
用于非氮基电子束电阻的导电保护涂层
用于在绝缘衬底上耗散电子束电荷的顶层
Characterisation 描述
- as protective coating, this resist is not sensitive to light / radiation
- thin, conductive layers for the dissipation of charges during electron exposure
- coating of non-novolac PMMA, CSAR 62, HSQ et al.
- longterm-stable and cost-efficient alternative to Espacer
- easy removal with water after exposure
- polyaniline-derivative dissolved in water and IPA